A Fabry-Perot Refractometer for Chemical Vapor Sensing by Solid-Phase Microextraction
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Authors
St-Gelais, R.
Mackey, G.
Saunders, J.
Zhou, J.
Leblanc-Hotte, A.
Poulin, A.
Barnes, Jack A.
Loock, Hans-Peter
Brown, Robert Stanley
Peter, Yves-Alain
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Abstract
The contour lithography method [1] is used to improve the fabrication yield of previously demonstrated [2] microfluidic Fabry-Perot (FP) refractive index (RI) sensors. The sensors are then coated with polydimethylsiloxane (PDMS) based polymers to detect vapor analytes by solid-phase microextraction (SPME). Preliminary characterization of devices coated with two different polymers and exposed to xylenes vapors yields a maximum sensitivity of 0.015 nm/ppm and a detection limit below 120 ppm.
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Keywords
Chemical Sensors, Fabry-Perot, Microfluidics, Microoptics, Optical Sensors, Optical Device Fabrication